Applications and Metrology at Nanometer Scale 1. Abdelkhalak El Hami

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Detection Using Polarized Light and Applications and Metrology at Nanometer Scale 1 & 2, jointly written by three authors, aim to develop knowledge that is essential at the nanometer scale, enabling trainee-engineers or engineers to develop nanotechnology- based devices or systems. To promote the deployment of nanotechnologies, the authors of these three books whose joint competences and experiences associate know-how in fundamental physics, engineering sciences and industrial activities cover a wide spectrum of application domains. Nanometer-scale Defect Detection Using Polarized Light builds a theoretical and experimental basis for understanding nanometer-scale metrology. This book in two volumes, Applications and Metrology at Nanometer Scale, enriches this theoretical basis with applications in the form of corrected exercises.

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