Microwave Plasma Sources and Methods in Processing Technology. Ladislav Bardos
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Foreword from the Authors
After our long research and development activities in Plasma science we can state that the plasma is a well controlled environmentally-friendly medium utilizing electric power and enabling the very-high temperature processes and low temperature reactions not available in other methods . This book is, therefore, intended to help the readers interested in the non-thermal gas discharge plasmas and their applications. The content is focused on the microwave-generated plasmas, which have specific properties due to relatively high frequency and which can be used in a number of non-conventional applications. Based on our experience, from university teaching and from communications with the industry people, no broad understanding exists of the microwave power and the microwave plasma systems. People know microwave ovens, but mostly for the heating of meals, and without understanding the principles and specifications of the microwave power. Little knowledge exists about different plasma systems and applications related to microwave power, even though there is apparently growing interest in this technology, mainly for new plasma chemical processes. A motivation for writing this book is based on the authors’ long experience with design and applications of several non-conventional systems and applications, which might stimulate readers when furthering their knowledge and when developing new systems.
The content of this book is composed of five basic parts, i.e. chapters. Chapter 1 is devoted to the microwave techniques and power systems from introducing their short history to the descriptions of individual parts and components in the microwave power