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Table of Contents
1 Cover
7 Preface Overview and Goals Organization and Features
9 Foreword
10 1 Evolution of Automation and Development Strategy of Intelligent Manufacturing with Zero Defects 1.1 Introduction 1.2 Evolution of Automation 1.3 Development Strategy of Intelligent Manufacturing with Zero Defects 1.4 Conclusion Appendix 1.A ‐ Abbreviation List References
11 2 Data Acquisition and Preprocessing 2.1 Introduction 2.2 Data Acquisition 2.3 Data Preprocessing 2.4 Case Studies 2.5 Conclusion Appendix 2.A ‐ Abbreviation List Appendix 2.B ‐ List of Symbols in Equations References
12 3 Communication Standards 3.1 Introduction 3.2 Communication Standards of the Semiconductor Equipment 3.3 Communication Standards of the Industrial Devices and Systems 3.4 Conclusion Appendix 3.A ‐ Abbreviation List References
13 4 Cloud Computing, Internet of Things (IoT), Edge Computing, and Big Data Infrastructure 4.1 Introduction 4.2 Cloud Computing 4.3 IoT and Edge Computing 4.4 Big Data Infrastructure 4.5 Conclusion Appendix 4.A ‐ Abbreviation List Appendix 4.B ‐ Abbreviation List References
14 5 Docker and Kubernetes 5.1 Introduction 5.2 Fundamentals of Docker 5.3 Fundamentals of Kubernetes 5.4 Conclusion Appendix 5.A ‐ Abbreviation List References
15 6 Intelligent Factory Automation (iFA) System Platform 6.1 Introduction 6.2 Architecture Design of the Advanced Manufacturing Cloud of Things (AMCoT) Framework 6.3 Brief Description of the Automatic Virtual Metrology (AVM) Server 6.4 Brief Description of the Baseline Predictive Maintenance (BPM) Scheme in the Intelligent Prediction Maintenance (IPM) Server 6.5 Brief Description of the Key‐variable Search Algorithm (KSA) Scheme in the Intelligent Yield Management (IYM) Server 6.6 The iFA System Platform 6.7 Conclusion Appendix 6.A ‐ Abbreviation List Appendix 6.B ‐ List of Symbols References
16 7 Advanced Manufacturing Cloud of Things (AMCoT) Framework 7.1 Introduction 7.2 Key Components of AMCoT Framework 7.3 Framework Design
