Whole-Angle MEMS Gyroscopes. Doruk Senkal

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      IEEE Press 445 Hoes Lane Piscataway, NJ 08854

      IEEE Press Editorial Board Ekram Hossain, Editor in Chief

Jón Atli Benediktsson David Alan Grier Elya B. Joffe
Xiaoou Li Peter Lian Andreas Molisch
Saeid Nahavandi Jeffrey Reed Diomidis Spinellis
Sarah Spurgeon Ahmet Murat Tekalp

      Whole-Angle MEMS Gyroscopes

      Challenges and Opportunities

       Doruk Senkal

       Andrei M. Shkel

      Copyright © 2020 by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.

      Published by John Wiley & Sons, Inc., Hoboken, New Jersey.

      Published simultaneously in Canada.

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       Library of Congress Cataloging-in-Publication Data is applied for

      ISBN 9781119441885

      Cover Design: Wiley

      Cover Image: Courtesy of Doruk Senkal

      List of Abbreviations

      Table 1 Control system abbreviations.

Symbol Description
Quadrature Unwanted component of oscillation that interferes with estimation of the pattern angle, manifests as a result of structural imperfections
AGC Amplitude Gain Control, closed‐loop control of drive amplitude
PLL Phase Locked Loop, closed‐loop control system that generates an AC signal with a predetermined phase offset from the resonator
FTR Force‐to‐rebalance, closed‐loop control system that actively drives the pattern angle to a setpoint
Quadrature null Closed‐loop control system that actively suppresses the effects of structural imperfections within the gyroscope

      Table 2 Mechanical parameters of the resonator.

Symbol Description
f Mean frequency of the two primary modes of the resonator
τ Mean energy decay time constant of the resonator
Q‐factor Ratio of stored energy to energy loss per vibration cycle (Q = τπf)
Δf Frequency split between primary modes in Hz (Δf = fxfy)
Δω Frequency split between primary modes in rad/s (Δω = ωxωy)

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