Chapter 5, two examples of 2‐D micro‐machined whole‐angle gyroscope architectures are reviewed: (i) Toroidal Ring Gyroscope (TRG) and (ii) Dual Foucault Pendulum (DFP) gyroscope. The goal of this chapter is to illustrate factors that influence design decisions, fabrication considerations, and characterization methodology.
In Chapter 6, recent advances in 3‐D shell micro‐technology for fabrication of whole‐angle gyroscopes are reviewed. Starting with a brief history of macro‐scale shell resonator gyroscopes, the chapter focuses on advances in micro‐shell resonator fabrication processes, with an emphasis on transduction mechanisms, characterization techniques, and mechanical properties.
In Chapter 7, the micro‐glassblowing paradigm is introduced for wafer‐level fabrication of atomically smooth, low internal loss Titania Silicate Glass (TSG) and fused silica 3‐D wineglass gyroscopes. Feasibility of the process has been demonstrated by fabrication of fused silica and TSG micro‐glassblown structures.
In Chapter 8, various transduction strategies for micro‐glassblown wineglass resonators are presented. Two methods of electrostatic transduction are reviewed in this chapter: (i) in‐plane electrodes and (ii) out‐of‐plane electrodes.
Finally, the book is concluded in Chapter 9 with an outlook of future trends.
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