Whole-Angle MEMS Gyroscopes. Doruk Senkal

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stabilization, traction control, and roll‐over detection;

       Gesture recognition and localization in gaming and mobile devices;

       Optical image stabilization (OIS) of cameras;

       Head tracking in Augmented Reality (AR) and Virtual Reality (VR);

       Autonomous vehicles, such as self‐driving cars and Unmanned Aerial Vehicles (UAVs).

‐axis) gyroscopes, which have
symmetry (
of 0 Hz), and nondegenerate mode gyroscopes, which are designed intentionally to be asymmetric in
and
modes (
). Degenerate mode
‐axis gyroscopes offer a number of unique advantages compared to nondegenerate vibratory rate gyroscopes, including higher rate sensitivity, ability to implement whole‐angle mechanization with mechanically unlimited dynamic range, exceptional scale factor stability, and a potential for self‐calibration.

‐axis gyroscope and its vibratory modes along
‐ and
‐axis.

      1.1.1 Nondegenerate Mode Gyroscopes

      Nondegenerate mode CVGs are currently being used in a variety of commercial applications due to ease of fabrication and lower cost. Most common implementations utilize two to four vibratory modes for sensing angular velocity along one to three axes. This is commonly achieved by forcing a proof mass structure into oscillation in a so‐called “drive” mode and sensing the oscillation on one or more “sense” modes. For example, the

‐axis of the gyroscope in Figure 1.1, can be instrumented as a drive mode and the
‐axis can be instrumented as a sense mode. When a nonzero angular velocity is exerted (i.e. along the
‐axis in Figure 1.1), the resultant Coriolis force causes the sense mode (i.e. the mode along the
‐axis in Figure 1.1) to oscillate at the drive frequency at an amplitude proportional to input angular velocity.

      Resonance frequency of sense modes are typically designed to be several hundreds to a few thousand hertzs away from the drive frequency. The existence of this so‐called drive‐sense separation (

) makes nondegenerate mode gyroscopes robust to fabrication imperfections. However, a trade‐off between bandwidth and transducer sensitivity exists since smaller drive‐sense separation frequency leads to higher transducer sensitivity, while the mechanical bandwidth of the sensor is typically limited by drive‐sense separation (
).

      Nondegenerate mode gyroscopes are typically operated using open‐loop mechanization. In open‐loop mechanization, “drive” mode oscillation is sustained via a positive feedback loop. The amplitidue of “drive” mode oscillations are controlled via the so‐called Amplitude Gain Control (AGC) loop. No feedback loop is employed on the “sense” mode, which leaves “sense” mode proof mass free to oscillate in response to the angular rate input.

      1.1.2 Degenerate Mode Gyroscopes

      Degenerate mode gyroscopes utilize two symmetric modes for detecting angular rotation. For an ideal degenerate mode gyroscope, these two modes have identical stiffness and damping; for this reason typically an axisymmetric or

symmetric structure is used, such as a ring, disk, wineglass, etc. Degenerate mode gyroscopes are commonly employed in two primary modes of instrumentation: (i) force‐to‐rebalance (FTR) (rate) mechanization and (ii) whole‐angle mechanization.

) of the degenerate mode gyroscope.

      In the whole‐angle mechanization, the two modes of the gyroscope are allowed to freely oscillate and external forcing is only applied to null the effects of imperfections such as damping and asymmetry. In this mode of operation the mechanical element acts as a “mechanical integrator” of angular velocity, resulting in an angle measuring gyroscope, also known as a Rate Integrating Gyroscope (RIG).

      String and bar resonators can also be instrumented to be used as whole‐angle gyroscopes, even though these types of mechanical elements are typically not used at micro‐scale due to limited transduction capacity. In principle, any axisymmetric elastic member can be instrumented to function as a whole‐angle gyroscope.

      Gyroscopes are susceptible to a variety of error sources caused by a combination of inherent physical processes

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